仪器科学专业硕士论文代写：关于漂移量靶标反馈激光自准直系统关键技术的探究
目录：
摘要 4-5
Abstract 5-6
第1章绪论 9-19
1.1课题研究的背景和意义 9-10
1.2国内外相关研究的发展与现状 10-14
1.2.1国外光电自准直技术发展现状 10-13
1.2.2我国光电自准直技术发展现状 13-14
1.3光电自准直技术的主要技术难题 14-17
1.3.1激光光束的平行漂移和角漂移 14-15
1.3.2激光束漂移量反馈控制方法 15-17
1.4课题的主要研究内容 17-19
第2章靶标反馈激光自准直原理 19-31
2.1引言 19
2.2激光束漂移量分类及产生机理 19-23
2.2.1激光器自身热漂移 19-21
2.2.2空气折射率变化引起的光束漂移 21-23
2.2.3大气随机扰动引起的光束漂移 23
2.3漂移量靶标反馈激光自准直系统整体结构 23-30
2.3.1自准直光学测量基本原理 24-25
2.3.2分光式靶标探测器角度分离原理 25-27
2.3.3自准直闭环控制系统组成及测量原理 27-30
2.4本章小结 30-31
第3章自准直系统关键技术研究 31-51
3.1引言 31
3.2角漂移量监测装置 31-34
3.2.1光电检测原理 31-32
3.2.2光电检测电路设计 32-34
3.3柔性铰链微动工作台设计 34-38
3.3.1柔性铰链工作原理 34-36
3.3.2柔性铰链参数设计 36-38
3.4压电陶瓷特性分析 38-40
3.5柔性微转角工作台闭环控制系统研究 40-41
3.6控制系统中的软件实现 41-50
3.6.1ADDA转换模块与QPD数据处理程序 42
3.6.2压电陶瓷驱动程序 42-44
3.6.3PID闭环控制算法子程序 44-50
3.7本章小结 50-51
第4章系统性能测试及不确定度分析 51-72
4.1引言 51
4.2系统各组成部分性能测试 51-61
4.2.1压电陶瓷驱动电源性能实验 51-56
4.2.2柔性微转角工作台性能实验 56-61
4.3自准直系统综合实验 61-66
4.3.1自准直系统稳定性实验 61-62
4.3.2自准直系统的测量分辨力 62-63
4.3.3自准直系统测量精度实验 63-66
4.4自准直系统不确定度分析 66-71
4.4.1圆孔目标安装偏差引入的不确定度分量 67-68
4.4.2CCD安装偏差引入的不确定度分量 68-69
4.4.3图像亚像素定位偏差引入的不确定度分量 69-70
4.4.4驱动电源DA转换引入的不确定度分量 70
4.4.5分光式靶标探测器变形引入的不确定度分量 70-71
4.5本章小结 71-72
结论 72-73
参考文献 73-79
攻读学位期间发表的学术论文 79-81
致谢 81
【摘要】 随着超精密加工、微电子、微光学、微机械集成制造和空间探测等技术的迅速发展,对超精密工作台的小角度测量精度和稳定性提出了更高的要求。传统的激光CCD自准直仪只能满足一般精度的角度测量问题,对于超精密工作台的小角度测量,则由于激光光束角漂移量的影响,使得测量精度难以提高。因此,开发和研制一种高精度高稳定性的超精密激光自准直测量系统迫在眉睫。课题“漂移量靶标反馈激光自准直系统关键技术”,目的就是探讨研究一种高稳定性的超精密激光自准直小角度测量方法,所涉及到的理论、方法以及若干关键技术,具体如下:从漂移量产生的机理入手,分析了各种漂移之间的内在联系以及对自准直测量的影响。在此基础上,提出了一种基于闭环反馈控制思想的激光CCD自准直小角度测量方法。利用分光式靶标探测器实现激光束角漂移量的实时分离,结合闭环反馈控制技术可实现高稳定性高精度小角度测量。对构成系统的自准直光学测量系统、分光式靶标探测器、角漂移量监测装置以及微转角工作台闭环控制系统等组成部分的特性进行了研究。研制了基于四象限光电探测器的光电检测电路,用于光束角漂移的实时监测;设计的柔性铰链微转角工作台,实现了压电陶瓷驱动器线位移向柔性铰链角位移的转换;通过完成系统辨识及参数整定获取增量式PID控制算法的控制参数,并且在Visual C++环境下完成包括光电信号采集及处理程序、压电陶瓷驱动程序、PID控制算法子程序等的系统软件开发。论文最后,对系统的各个主要组成部分进行了性能测试和实验研究,测试和分析了压电陶瓷驱动电源的静态稳定性,电压分辨率以及输出线性特性;测试和分析了柔性微转角工作台的迟滞和非线性。用双频激光干涉仪对测量系统的测量稳定性以及测量精度分别进行了比对实验。论文结尾,对自准直系统的测量不确定度进行了简要分析。实验结果表明,系统的稳定性由控制前的0.23″提高到0.14″,测量精度由控制前的0.24″提高到0.16″。充分验证了其正确性和有效性。
硕士论文代写【Abstract】 With the rapid development of the ultra-precision manufacturing, microelec- tronics, micro-optics, micro-mechanical integrated manufacturing technology and space exploration, higher requirements on the measuring accuracy and stability of ultra-precision small-angle measuring table become more and more stringent. Traditional photoelectric autocollimators can only satisfy the common accuracy of small-angle measurements. But it is difficult to improve the accuracy in ultra-precision measurement for the influence of laser beam shift caused by laser thermal distortion, air disturbance, etc. Therefore, it is stringent to research and development an ultra-precision laser CCD autocollimation measuring system with high measurement accuracy and stability.In the subject The Key Technologies of Autocollimation System Based on the Beam-Splitting Target Detecting Feedback of Laser Beam shift, a method of ultra-precision laser CCD autocollimation technique for small-angle measure- ment is researched. The theoretics, methods and key technologies concerning are expounded in detail as following sections:Firstly, the dissertation makes theoretical analysis of the reasons cause laser beam shift, furthermore, the internal relations among these drifts and their influences on laser autocollimation measurement. Based on this, a new laser CCD small angle measurement method based on closed-loop feedback control techniques is proposed. A novel Beam-splitting Target Detector is designed to realize the separation of laser beam shift from measuring beam, and to achieve higher stability and accuracy applying closed-loop feedback control techniques.We study on the autocollimation optical measurement system, the beam-splitting target detector, the beam shift detecting device, the flexible micro rotating worktable, the closed-loop feedback control system made up of a PZT actuator and a micro rotating worktable and then, an photoelectric detect circuit with a four quadrants photoelectric detector is designed for real-time monitoring of the beam drift; complete parameter design and development of a flexible hinge to realize the conversion from the displacement of piezoelectric ceramic to angular change of the flexible hinge; get PID parameters by system identification and parameter setting; complete software design of the autocollimation system under the Visual C++ environment, which includes photoelectric signal acquisition and DAC module, piezoelectric ceramic driver program and PID control algorithm, etc..Experiment for the performance of each main component of this system is performed and researched. We test and analyze the static stability under various voltages, the voltage resolution, the output linear characteristics of the PZT driving power and the nonlinear of the flexible micro rotating worktable. We also make contrastive experiments for the measuring stability, resolution and uncertainty using the dual-frequency laser interferometer. And lastly, we analyze and research the measuring errors of the system. In the end, we also analyze every error source for the system.The experiment results indicated that the stability has improved from 0.23″to 0.14″, and the accuracy has improved from 0.24″to 0.16″since the applying of the closed-loop feedback control, which fully verify the correctness and effectiveness of this approach.
【关键词】 自准直； 角漂移量； 反馈控制； 分光式靶标探测；
【Key words】 Autocollimation； Beam shif； Feedback Control； Beam-splitting target detect；